Plasma-assisted approaches in inorganic nanostructure fabrication.

Abstract

Plasma is a unique medium for chemical reactions and materials preparations, which also finds its application in the current tide of nanostructure fabrication. Although plasma-assisted approaches have been long used in thin-film deposition and the top-down scheme of micro-/nanofabrication, fabrication of zero- and one-dimensional inorganic nanostructures… (More)
DOI: 10.1002/adma.200903147

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Cite this paper

@article{Li2010PlasmaassistedAI, title={Plasma-assisted approaches in inorganic nanostructure fabrication.}, author={Xingguo Li and Rong Yang and Lei Xie and Jianglan Qu and Yang Liu}, journal={Advanced materials}, year={2010}, volume={22 13}, pages={1451-73} }