Planar micro flame ionization detector with minimized leak current

Abstract

The flame ionization detector (FID) is the preferred method of hydrocarbon detection. Unfortunately, it is operated at high fuel and oxidant gas flow and therefore not suitable for portable applications. This work presents an FID miniaturized by means of MEMS technology (μFID) to reduce gas consumption. A former low-flow µFID suffers from a… (More)

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