Piezoresistive InGaAs/GaAs nanosprings with metal connectors.

@article{Hwang2009PiezoresistiveIN,
  title={Piezoresistive InGaAs/GaAs nanosprings with metal connectors.},
  author={Gilgueng Hwang and Hideki Hashimoto},
  journal={Nano letters},
  year={2009},
  volume={9 2},
  pages={554-61}
}
This paper presents the fabrication, assembly, and characterization of piezoresistive nanosprings for creating nanoelectromechanical systems. The fabrication process is based on conventional microfabrication techniques to create a planar pattern in a 27nm thick, n-type InGaAs/GaAs bilayer that self-forms into three-dimensional structures during a wet etch release. As the nanosprings have lower doped thin and flexible layers, small metal pads have been attached to both sides for achieving stable… CONTINUE READING
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