Piezoelectrically actuated flextensional micromachined ultrasound transducers. I. Theory

@article{Perin2002PiezoelectricallyAF,
  title={Piezoelectrically actuated flextensional micromachined ultrasound transducers. I. Theory},
  author={G{\"o}khan Perçin and B. Khuri-yakub},
  journal={IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control},
  year={2002},
  volume={49},
  pages={573-584}
}
This series of two papers considers piezoelectrically actuated flextensional micromachined ultrasound transducers (PAFMUTs) and consists of theory, fabrication, and experimental parts. The theory presented in this paper is developed for an ultrasound transducer application presented in the second part. In the absence of analytical expressions for the equivalent circuit parameters of a flextensional transducer, it is difficult to calculate its optimal parameters and dimensions and difficult to… CONTINUE READING
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