Corpus ID: 16462423

Piezoelectric versus electrostatic actuation for a capacitive RF-MEMS switch

@inproceedings{Klaasse2002PiezoelectricVE,
  title={Piezoelectric versus electrostatic actuation for a capacitive RF-MEMS switch},
  author={G. Klaasse and R. Puers and H. Tilmans},
  year={2002}
}
  • G. Klaasse, R. Puers, H. Tilmans
  • Published 2002
  • Materials Science
    • -In this paper, piezoelectric actuation is compared with electrostatic actuation for application in RF-MEMS switches with respect to actuation voltage and technological implementation. The expression for the actuation voltages of electrostatic and piezoelectric actuation are discussed and compared with respect to scaling. Calculation examples show actuation voltages for a cantilever beam of 1μm thick and 100μm long of 25.0V for electrostatic actuation and 18.9V and 2.39V for piezoelectric… CONTINUE READING
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    References

    SHOWING 1-10 OF 12 REFERENCES
    RF MEMS switches and switch circuits
    • 1,006
    Basic investigations on a piezoelectric bending actuator for micro-electro-mechanical applications
    • 12
    Modeling and optimal design of piezoelectric cantilever microactuators
    • 345
    RF MEMS from a device perspective
    • 435
    Performance of low-loss RF MEMS capacitive switches
    • 448
    • PDF
    The constituent equations of piezoelectric heterogeneous bimorphs
    • J.G. Smits, W. Choi
    • Engineering, Medicine
    • IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
    • 1991
    • 440
    Reliable integration of piezoelectric lead zirconate titanate with MEMS fabrication processes
    • 15
    Pull-in voltage analysis of electrostatically actuated beam structures with fixed–fixed and fixed–free end conditions
    • 376
    Tilmans: “Pull-in voltage analysis of electrostatically actuated beam structures with fixed-fixed and fixedfree end conditions
    • Journal of Micromechanics and Microengineering,
    • 2002
    Schnakenberg: “Basic investigations on a piezoelectric bending actuator for micro-electromechanical applications
    • Integrated Ferroelectrics,
    • 2001