Piezoelectric response of novel multiferroic microcantilevers

  title={Piezoelectric response of novel multiferroic microcantilevers},
  author={K. Prashanthi and Thomas G. Thundat and V. R. Palkar},
  journal={2011 International Symposium on Applications of Ferroelectrics (ISAF/PFM) and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials},
Recently developed magnetoelectric (M-E) multiferroic system, Dy modified BiFeO3 (Bi0.7Dy0.3FeO3 or BDFO) exhibits ferromagnetism and ferroelectricity at room temperature with significant M-E coupling. We have been successful in developing a CMOS compatible MEMS fabrication process using BDFO and fabricated BDFO microcantilevers directly on Si. The fabricated BDFO cantilevers are tested for the actuation using magnetic as well as electric fields. In this paper, the piezoelectric behavior of… CONTINUE READING