Piezoelectric micromechanical disk resonators towards UHF band

@article{Yan2004PiezoelectricMD,
  title={Piezoelectric micromechanical disk resonators towards UHF band},
  author={Le Yan and Jian Wu and W. C. Tang},
  journal={IEEE Ultrasonics Symposium, 2004},
  year={2004},
  volume={2},
  pages={926-929 Vol.2}
}
This paper presents the design, simulation, fabrication, and test results of a new type of piezoelectrically transduced micromechanical disk resonator approaching UHF frequencies. The resonators were fabricated from silicon-on-insulator (SOI) wafers with a 4-mask low-temperature process. The highest processing temperature was 250/spl deg/C, allowing post-CMOS integration compatibility. Several prototype resonators with measured diameter of 100 /spl mu/m and 60 /spl mu/m were tested in air, with… CONTINUE READING
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