Piezoelectric Parylene-C MEMS microphone

Abstract

There has long been a strong interest in the use of thin-film piezoelectric materials for MEMS microphones and actuators. However, well-known thin-film piezoelectric materials all have different degrees of technological difficulties for MEMS integration. Here, we demonstrated the first piezoelectric Parylene-C (PA-C) based MEMS microphone with a diaphragm… (More)

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Cite this paper

@article{Kim2013PiezoelectricPM, title={Piezoelectric Parylene-C MEMS microphone}, author={J. Y.-H Kim and Yi Liu and N. Scianmarello and Yu Chong Tai}, journal={2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)}, year={2013}, pages={39-42} }