PiezoNEMS: Semiconductor nanowires and heterostructures for sensing and energy harvesting

@article{Monts2012PiezoNEMSSN,
  title={PiezoNEMS: Semiconductor nanowires and heterostructures for sensing and energy harvesting},
  author={L. Mont{\`e}s and Xin Xu and Alexis Poti{\'e} and Bogdan Bercu and R. Hinchet and Florent Rochette and G. Ardila and Panagiota Morfouli and M. Mouis and Rudeesun Songmuang and B. Salem and Thierry Baron},
  journal={2012 International Semiconductor Conference Dresden-Grenoble (ISCDG)},
  year={2012},
  pages={69-74}
}
In this paper we present new concepts of piezoresistive and piezoelectric devices based on nanowires and heterostructured nanowires, that could be integrated in future IC devices for sensing and/or mechanical energy harvesting. In a first part we introduce a new method to investigate the piezoresistive properties of nanodevices such as 50nm Fully Depleted SOI field effect transistors and nanowires, based on an ultrathin membrane. This new technique is used to apply large strain in the devices… CONTINUE READING