Physico-chemical study of the focused electron beam induced deposition process

  title={Physico-chemical study of the focused electron beam induced deposition process},
  author={Tristan Bret},
  • T. Bret
  • Published 25 November 2005
  • Physics
The focused electron beam induced deposition process is a promising technique for nano and micro patterning. Electrons can be focused in sub-angstrom dimensions, which allows atomic-scale resolution imaging, analysis, and processing techniques. Before the process can be used in controlled applications, the precise nature of the deposition mechanism must be described and modelled. The aim of this research work is to present a physical and chemical description of the focused electron beam induced… 
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