Photoelectrochemical Methods for Semiconductor Device Processing

  • Kohl, DEREK B. HARRIS
  • Published 2001

Abstract

me usefulness and capabilities of photoelectrochemical processing of III-V semiconductors is presented. Examples include the etching of small period gratings, the formation of integral lenses, the decomposition of small bandgap semiconductors, the etching of ptype semiconductors, and the photoinitiated deposition of metal. The transport of carriers in the… (More)

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