Photoconductive UV Detectors Based on ZnO Films Prepared by R.F. Magnetron Sputtering Method

@inproceedings{Tuyen2010PhotoconductiveUD,
  title={Photoconductive UV Detectors Based on ZnO Films Prepared by R.F. Magnetron Sputtering Method},
  author={Nguyen Tan Viet Tuyen and Ta Dinh Canh and Nguyễn Ngọc Long},
  year={2010}
}
Highly c-axis oriented zinc oxide (ZnO) thin films were deposited on glass substrates by radio frequency (r.f.) sputtering. The photoconductor UV detector based on ZnO films, having a metal-semiconductor-metal (MSM) structure with interdigitation configuration, were fabricated by using aluminium (Al) as a contact metal. The characteristics of dark and photocurrent of the ultraviolet (UV) detector and the UV photo-response of the detector were investigated. The linear current-voltage (I-V… CONTINUE READING

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