Phase-shifting birefringent scatterplate interferometer.


We realized what we believe is a new phase-shifting scatterplate interferometer by exploiting the polarization characteristics of a birefringent scatterplate. The common-path design of the interferometer reduces its sensitivity to environmental effects, and phase shifting allows quick and accurate quantitative measurements of the test surface. A major… (More)

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@article{NorthMorris2002PhaseshiftingBS, title={Phase-shifting birefringent scatterplate interferometer.}, author={Michael B. North-Morris and Jay VanDelden and James C. Wyant}, journal={Applied optics}, year={2002}, volume={41 4}, pages={668-77} }