Phase-shifter using submicron silicon waveguide couplers with ultra-small electro-mechanical actuator.

  title={Phase-shifter using submicron silicon waveguide couplers with ultra-small electro-mechanical actuator.},
  author={Taro Ikeda and Kazunori Takahashi and Yoshiaki Kanamori and Kazuhiro Hane},
  journal={Optics express},
  volume={18 7},
Phase shifter is an important part of optical waveguide circuits as used in interferometer. However, it is not always easy to generate a large phase shift in a small region. Here, a variable phase-shifter operating as delay-line of silicon waveguide was designed and fabricated by silicon micromachining. The proposed phase-shifter consists of a freestanding submicron-wide silicon waveguide with two waveguide couplers and an ultrasmall silicon comb-drive actuator. The position of the freestanding… CONTINUE READING


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