Phase control in multiexposure spatial frequency multiplication

@article{Zhao2007PhaseCI,
  title={Phase control in multiexposure spatial frequency multiplication},
  author={Y. Zhao and Chih-Hao Chang and R. Heilmann and M. Schattenburg},
  journal={Journal of Vacuum Science \& Technology B},
  year={2007},
  volume={25},
  pages={2439-2443}
}
Multiexposure spatial frequency multiplication is a technique that allows the spatial frequency of grating patterns to be increased by integer factors 2,3,4,… by applying a nonlinear development process between patterning steps. One of the main technical issues with this technique is how to accurately place subsequent patterns on a substrate with respect to previously established patterns, which is referred to as phase control of the overlay. The authors report a technique that achieves… Expand
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