Petri net-based response policies to process module failure in time-constrained single-arm cluster tools

@article{Qiao2014PetriNR,
  title={Petri net-based response policies to process module failure in time-constrained single-arm cluster tools},
  author={Yan Qiao and Naiqi Wu and ChunRong Pan and Mengchu Zhou},
  journal={Proceedings of the 11th IEEE International Conference on Networking, Sensing and Control},
  year={2014},
  pages={144-149}
}
For wafer fabrication, a process module (PM) in cluster tools is prone to failure. It is crucial to deal with such failure in a proper and timely manner. With residency time constraints, if there are feasible periodic schedules in operating a cluster tool before and after a PM failure, it is desired to make it operate continuously when such a failure occurs… CONTINUE READING