Perspectives on oblique angle deposition of thin films: From fundamentals to devices

@article{Barranco2016PerspectivesOO,
  title={Perspectives on oblique angle deposition of thin films: From fundamentals to devices},
  author={A. Barranco and A. Borr{\'a}s and A. R. Gonzalez-Elipe and A. Palmero},
  journal={Progress in Materials Science},
  year={2016},
  volume={76},
  pages={59-153}
}
  • A. Barranco, A. Borrás, +1 author A. Palmero
  • Published 2016
  • Materials Science
  • Progress in Materials Science
  • Abstract The oblique angle configuration has emerged as an invaluable tool for the deposition of nanostructured thin films. This review develops an up to date description of its principles, including the atomistic mechanisms governing film growth and nanostructuration possibilities, as well as a comprehensive description of the applications benefiting from its incorporation in actual devices. In contrast with other reviews on the subject, the electron beam assisted evaporation technique is… CONTINUE READING
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