Periodically porous top electrodes on vertical nanowire arrays for highly sensitive gas detection

  title={Periodically porous top electrodes on vertical nanowire arrays for highly sensitive gas detection},
  author={Hyun Jin In and Christopher R. Field and Pehr E. Pehrsson},
Nanowires of various materials and configurations have been shown to be highly effective in the detection of chemical and biological species. In this paper, we report a novel, nanosphere-enabled approach to fabricating highly sensitive gas sensors based on ordered arrays of vertically aligned silicon nanowires topped with a periodically porous top electrode. The vertical array configuration helps to greatly increase the sensitivity of the sensor while the pores in the top electrode layer… 

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