Performance optimization of high-order Lamb wave sensors based on silicon carbide substrates.

Silicon carbide (SiC), as a new type of material for substrates in micro-electromechanical system (MEMS), was given high consideration in virtue of the properties of high acoustic velocity, low loss, chemical resistance, and etc. In this work, five performance parameters, which are electromechanical coupling coefficients, mass sensitivities, conductivity… CONTINUE READING