Performance-Improved Design of N-PID Controlled Motion Systems With Applications to Wafer Stages

Abstract

A nonlinear filter design is proposed to improve nanopositioning servo performances in high-speed (and generally linear) motion systems. The design offers a means to adapt fundamental control design tradeoffs-like disturbance suppression versus noise sensitivity-which are otherwise fixed. Typically performance-limiting oscillations in the feedback system… (More)
DOI: 10.1109/TIE.2009.2012420

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