Perfectly notched long-period fiber grating filter based on ICP dry etching technique.

Abstract

This study presents a new process using inductively a coupled plasma dry etching method to manufacture a long-period fiber grating filter with exact period, vertical sidewalls, and smooth etched surfaces, and the filter is thus named a perfectly notched long-period fiber grating (NLPFG). This process can dramatically reduce production time, and thereby… (More)
DOI: 10.1364/OL.37.000193

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Cite this paper

@article{Chiang2012PerfectlyNL, title={Perfectly notched long-period fiber grating filter based on ICP dry etching technique.}, author={Chia-Chin Chiang and Liren Tsai}, journal={Optics letters}, year={2012}, volume={37 2}, pages={193-5} }