Patterning of Ge2Sb2Te5 phase change material using UV nano-imprint lithography

@inproceedings{Yang2007PatterningOG,
  title={Patterning of Ge2Sb2Te5 phase change material using UV nano-imprint lithography},
  author={Ki Yeon Yang and Sung Hoon Hong and Deok Kee Kim and Byung Ki Cheong and Heon Lee},
  year={2007}
}