Path toward manufacturable superconducting qubits with relaxation times exceeding 0.1 ms

  title={Path toward manufacturable superconducting qubits with relaxation times exceeding 0.1 ms},
  author={Jeroen Verjauw and Rohith Acharya and Jacques Van Damme and Tsvetan Ivanov and Daniel Perez Lozano and Fahd A. Mohiyaddin and Danny Wan and Julien Jussot and A. M. Vadiraj and Massimo Mongillo and Marc M. Heyns and Iuliana P. Radu and Bogdan Govoreanu and A. Poto{\vc}nik},
  journal={npj Quantum Information},
As the superconducting qubit platform matures towards ever-larger scales in the race towards a practical quantum computer, limitations due to qubit inhomogeneity through lack of process control become apparent. To benefit from the advanced process control in industry-scale CMOS fabrication facilities, different processing methods will be required. In particular, the double-angle evaporation and lift-off techniques used for current, state-of-the-art superconducting qubits are generally… 

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