Passivation of laser grooved buried contacts (LGBC) solar cells with silicon oxide or silicon nitride grown by a remote sputtering deposition system

Abstract

Silicon nitride (SiN<inf>x</inf>) and Silicon Oxide (SiO<inf>2</inf>) thin films have been deposited by a new remote plasma deposition system HiTUS (High Target Utilisation Sputtering). The remote plasma geometry allows, pseudo separation of plasma/target-bias parameters, avoiding ion bombardment, and effectively eliminates poisoning, making it an… (More)

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Cite this paper

@article{Claudio2008PassivationOL, title={Passivation of laser grooved buried contacts (LGBC) solar cells with silicon oxide or silicon nitride grown by a remote sputtering deposition system}, author={Gori Giorgi Claudio and Z. Zhou and Carina Hibberd and Kelli Bass}, journal={2008 33rd IEEE Photovoltaic Specialists Conference}, year={2008}, pages={1-6} }