Parylene-on-oil packaging for long-term implantable pressure sensors.

  title={Parylene-on-oil packaging for long-term implantable pressure sensors.},
  author={Aubrey Shapero and Yang Liu and Yu-Chong Tai},
  journal={Biomedical microdevices},
  volume={18 4},
This paper reports and analyzes the feasibility study of a parylene-on-oil encapsulation packaging method of pressure sensors targeted for long-term implantation. Commercial barometric digital-output pressure sensors are enclosed in silicone oil and then encapsulated in situ with parylene-C or -D (PA-C, PA-D) chemical vapor deposition. Experimentally… CONTINUE READING