Parametric uncertainty in nanoscale optical dimensional measurements.

Abstract

Image modeling establishes the relation between an object and its image when an optical microscope is used to measure the dimensions of an object of size comparable to the illumination wavelength. It accounts for the influence of all of the parameters that can affect the image and relates the apparent feature width (FW) in the image to the true FW of the… (More)
DOI: 10.1364/AO.51.003707

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