Parametric Analysis and Efficient Optimization of Micro Thermal Convective Accelerometers with Excellent Sensitivity Using a Validated 1-D Model

@article{Wang2018ParametricAA,
  title={Parametric Analysis and Efficient Optimization of Micro Thermal Convective Accelerometers with Excellent Sensitivity Using a Validated 1-D Model},
  author={Xiaoyi Wang and Wei Xu and Beiqi Lijin and Moaaz Ahmed and Amine Bermak and Yi-Kuen Lee},
  journal={2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)},
  year={2018},
  pages={245-248}
}
We proposed a general T-dimensional (1D) and SPICE model for the parametric analysis and efficient optimization of Micro Thermoresistive Convective Accelerometers (MTCA). The validated sensor model with 6 key parameters can predict (1) the sensor output, sensitivity and power consumption, (2) the optimal distance $(\pmb{D}_{o})$ between microheater and thermoresisitve temperature sensors, (3) the overheat temperature $(\Delta \pmb{T}_{\pmb{h}}=\pmb{T}_{\pmb{h}}-\pmb{T}_{\pmb{a}})$, (4) membrane… CONTINUE READING

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