PMN-PT single crystal thick films on silicon substrate for high-frequency micromachined ultrasonic transducers

@article{Peng2008PMNPTSC,
  title={PMN-PT single crystal thick films on silicon substrate for high-frequency micromachined ultrasonic transducers},
  author={Jue Peng and Sienting Lau and Chen Chao and Jiyan Dai and H. L. W. Chan and Haosu Lu and Q. F. Zhou and K. Kirk Shung},
  journal={2008 IEEE Ultrasonics Symposium},
  year={2008},
  pages={161-163}
}
In this work, a novel high-frequency ultrasonic transducer structure is realized by using PMNPT-on-silicon technology and silicon micromachining. To prepare the single crystalline PMNPT-on-silicon wafers, a hybrid processing method involving wafer bonding, mechanical lapping and wet chemical thinning is successfully developed. The active element is fixed within the stainless steel needle housing. The measured center frequency and -6 dB bandwidth of the transducer are 35 MHz and 34… CONTINUE READING
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