P2P-1 Multilayer cMUT Structure for Improved Sensitivity and Bandwidth


The electrical and mechanical behavior of cMUTs is currently under investigation. The mechanical characteristics of the membranes as well as the air-gap size determine the sensitivity, the maximum pressure level and the operating frequencies of cMUT devices. In this work, we report on a novel multilayer cMUT vibrating structure made of a stack of flexural… (More)


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