P2P-1 Multilayer cMUT Structure for Improved Sensitivity and Bandwidth

Abstract

The electrical and mechanical behavior of cMUTs is currently under investigation. The mechanical characteristics of the membranes as well as the air-gap size determine the sensitivity, the maximum pressure level and the operating frequencies of cMUT devices. In this work, we report on a novel multilayer cMUT vibrating structure made of a stack of flexural… (More)

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