Oxidized Macro Porous Silicon layer as an effective material for thermal insulation in thermal effect microsystems.

@article{Mondal2009OxidizedMP,
  title={Oxidized Macro Porous Silicon layer as an effective material for thermal insulation in thermal effect microsystems.},
  author={Bilkish Mondal and P. K. Basu and B. Sree Charan Teja Reddy and H. Saha and Pratyusha Bhattacharya and C. Roychoudhury},
  journal={2009 International Conference on Emerging Trends in Electronic and Photonic Devices & Systems},
  year={2009},
  pages={202-206}
}
In this work the process for the realization of Oxidised Macro Porous Silicon (OMPS) layer as a material for thermal isolation has been studied. Macro Porous silicon layers are created by anodisation of P-type (10–20 Ω-cm) silicon with HF and DMF (Dimethylformamide), which are then followed by thermal oxidation in order to find a compromise between higher thermal isolation and good mechanical stability. The morphology of the samples are studied by FESEM. A simple model for determining the… CONTINUE READING