Overlay as the key to drive wafer scale 3D integration

@article{Steen2007OverlayAT,
  title={Overlay as the key to drive wafer scale 3D integration},
  author={Steven E. Steen and Douglas LaTulipe and Anna W. Topol and David J. Frank and Kevin Belote and Dominick Posillico},
  journal={Microelectronic Engineering},
  year={2007},
  volume={84},
  pages={1412-1415}
}
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