Overcoming SiN film stress limitations for high quality factor ring resonators

@article{Luke2013OvercomingSF,
  title={Overcoming SiN film stress limitations for high quality factor ring resonators},
  author={Kevin Luke and Carl B. Poitras and Michal Lipson},
  journal={2013 IEEE Photonics Society Summer Topical Meeting Series},
  year={2013},
  pages={64-65}
}
  • K. Luke, C. Poitras, M. Lipson
  • Published 12 June 2013
  • Materials Science, Physics, Medicine
  • 2013 IEEE Photonics Society Summer Topical Meeting Series
We overcome stress limitations of thick SiN films using termination trenches to isolate the device area from crack propagation. We measure an unprecedented quality factor of 6.5 million in a high confinement SiN ring resonator. 
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