Optimum beam transfer in the environmental scanning electron microscope.

@article{Danilatos2009OptimumBT,
  title={Optimum beam transfer in the environmental scanning electron microscope.},
  author={Gerasimos D. Danilatos},
  journal={Journal of microscopy},
  year={2009},
  volume={234 1},
  pages={26-37}
}
The gas density of argon along the axis of a pressure-limiting aperture in an environmental scanning electron microscope is found by the direct simulation Monte Carlo method. The aperture is made on a thin material plate, producing the sharpest possible transition region between the specimen chamber and the differentially pumped region downstream of the gas flow. The entire regime from free molecule to continuum flow has been studied, which covers any size of aperture diameter and any pressure… CONTINUE READING

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