Optimizing precision of rotating-analyzer ellipsometers

@article{Aspnes1974OptimizingPO,
  title={Optimizing precision of rotating-analyzer ellipsometers},
  author={D. E. Aspnes},
  journal={Journal of the Optical Society of America},
  year={1974},
  volume={64},
  pages={639-646}
}
  • D. E. Aspnes
  • Published 1974
  • Physics
  • Journal of the Optical Society of America
  • General equations describing the theoretical uncertainty in the measurement of the complex reflectance ratio, ρ, are given for rotating-analyzer ellipsometers operating under shot-noise-limited, detector-noise-limited, and incident power-fluctuation-limited (ideal-detector) conditions. In the latter case, uncertainty is minimized when the light reflected from the sample surface is circularly polarized. For shot-noise- and detector-noise-limited configurations, minimum uncertainty is obtained as… CONTINUE READING
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    References

    SHOWING 1-10 OF 17 REFERENCES