Optimized design of a silicon based MEMS pressure sensor for wider range and better sensitivity

Abstract

Micro Electro Mechanical System pressure sensors have been simulated with different structures for obtaining wider operation range with better sensitivity. The performance has been simulated and analyzed for silicon and SOI (Silicon-on-Insulator) pressure sensors. The performance of silicon and SOI pressure sensor at a given pressure and temperature are… (More)

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Cite this paper

@article{Suja2013OptimizedDO, title={Optimized design of a silicon based MEMS pressure sensor for wider range and better sensitivity}, author={K. J. Suja and Vidya Gopal and Rama Komaragiri}, journal={2013 Annual International Conference on Emerging Research Areas and 2013 International Conference on Microelectronics, Communications and Renewable Energy}, year={2013}, pages={1-5} }