Optimization of Surface Acoustic Wave-Based Rate Sensors

  title={Optimization of Surface Acoustic Wave-Based Rate Sensors},
  author={Fangqian Xu and Wen Wang and Xiuting Shao and Xinlu Liu and Yong Liang},
The optimization of an surface acoustic wave (SAW)-based rate sensor incorporating metallic dot arrays was performed by using the approach of partial-wave analysis in layered media. The optimal sensor chip designs, including the material choice of piezoelectric crystals and metallic dots, dot thickness, and sensor operation frequency were determined theoretically. The theoretical predictions were confirmed experimentally by using the developed SAW sensor composed of differential delay line… CONTINUE READING