Optimization of Geometry of Microfabricated Piezoelectric Actuator

@inproceedings{Sutradhar2013OptimizationOG,
  title={Optimization of Geometry of Microfabricated Piezoelectric Actuator},
  author={Souvik Sutradhar},
  year={2013}
}
This paper focuses on optimization of the geometry of piezoelectric actuator for maximization of output for applications such as micro-pump. The device structure consists of a piezoelectric disk/plate which is glued on the top of a silicon plate. Under various constraints the displacement or deflection of the silicon plate attached to the piezoelectric material plate is obtained from simulation and used for the analysis. For analysis purpose a circular and a square shaped silicon plate/membrane… CONTINUE READING