Optimization of CMP from the Viewpoint of Consumable Effects

@inproceedings{Luo2003OptimizationOC,
  title={Optimization of CMP from the Viewpoint of Consumable Effects},
  author={Jianfeng Luo and David A. Dornfeldz},
  year={2003}
}
Systematic methods for the optimization of chemical mechanical planarization ~CMP! from the viewpoint of consumable effects are discussed. Two methods, one, the precision control and design of the pad topography, and the second, the precision control and design of the abrasive size distribution are proposed to optimize the material removal rate and… CONTINUE READING