• Materials Science, Engineering
  • Published in
    Applied Optics and Photonics…
    2011
  • DOI:10.1117/12.900520

Optimization design and fabrication of a novel optical-readout uncooled thermal imaging chip

@inproceedings{Zhou2011OptimizationDA,
  title={Optimization design and fabrication of a novel optical-readout uncooled thermal imaging chip},
  author={Yuxiu Zhou and Hong Zhou and Yanxiang Liu and Yi Wang and Tie Li and Yuelin Wang},
  booktitle={Applied Optics and Photonics China},
  year={2011}
}
Infrared imaging systems are widely used in many fields, so it's of great importance to develop thermal imaging systems of independent intellectual property rights. In this paper, a novel MEMS optical readout uncooled thermal imaging chip was developed. The front-side-etching design with narrow windows shortened the etching time and greatly increased the yield. The theoretical thermal-mechanical analysis was carried out to optimize the structure parameters. Thermal conductance can be… CONTINUE READING

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