Optimal scheduling of k-unit production of cluster tools with single-blade robots

@article{Chan2008OptimalSO,
  title={Optimal scheduling of k-unit production of cluster tools with single-blade robots},
  author={Wai Kin Chan and Jingang Yi and Shengwei Ding and Dezhen Song},
  journal={2008 IEEE International Conference on Automation Science and Engineering},
  year={2008},
  pages={335-340}
}
The main challenge in scheduling multi-cluster tools in semiconductor manufacturing is the interactions among clusters. These interactions create a k-unit optimal production that do not exist in single-cluster tools. This paper analyzes optimal scheduling of k-unit cycle production of multi-cluster tools with single-blade robots. A resource-based method is… CONTINUE READING