Optimal design of high precision XY-scanner with nanometer-level resolution and millimeter-level working range

@inproceedings{Kang2009OptimalDO,
  title={Optimal design of high precision XY-scanner with nanometer-level resolution and millimeter-level working range},
  author={Dong-Woo Kang and Kihyun Kim and Dong Myong Kim and JongYoup Shim and Dae-Gab Gweon and Jaehwa Jeong},
  year={2009}
}
Abstract This article presents the design and performance evaluation of a compact high precision XY -scanner providing nanometer-level resolution and a millimeter-level travel range. The proposed XY -scanner is composed of a voice coil motor (VCM) and double compound linear spring flexure guide mechanism. The challenge was to determine design variables properly while simultaneously satisfying the requirements of high resolution, long working range, high response speed, and compact size, because… CONTINUE READING

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