Optimal design and fabrication of three-dimensional calibration specimens for scanning probe microscopy.

@article{Liu2012OptimalDA,
  title={Optimal design and fabrication of three-dimensional calibration specimens for scanning probe microscopy.},
  author={Xiaoning Liu and Tingting Luo and Yuhang Chen and Wenhao Huang and Guido Piaszenski},
  journal={The Review of scientific instruments},
  year={2012},
  volume={83 5},
  pages={
          053708
        }
}
Micro-/nano-scale roughness specimens are highly demanded to synthetically calibrate the scanning probe microscopy (SPM) instrument. In this study, three-dimensional (3D) specimens with controllable main surface evaluation parameters were designed. In order to improve the design accuracy, the genetic algorithm was introduced into the conventional digital filter method. A primary 3D calibration specimen with the dimension of 10 μm × 10 μm was fabricated by electron beam lithography. Atomic force… CONTINUE READING
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