Optimal Scheduling of Multicluster Tools With Constant Robot Moving Times, Part I: Two-Cluster Analysis

@article{Chan2011OptimalSO,
  title={Optimal Scheduling of Multicluster Tools With Constant Robot Moving Times, Part I: Two-Cluster Analysis},
  author={Wai Kin Chan and Jingang Yi and Shengwei Ding},
  journal={IEEE Transactions on Automation Science and Engineering},
  year={2011},
  volume={8},
  pages={5-16}
}
In semiconductor manufacturing, finding an efficient way for scheduling a multicluster tool is critical for productivity improvement and cost reduction. This two-part paper analyzes optimal scheduling of multicluster tools equipped with single-blade robots and constant robot moving times. In this first part of the paper, a resource-based method is proposed to analytically derive closed-form expressions for the minimal cycle time of two-cluster tools. We prove that the optimal robot scheduling… CONTINUE READING
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Cyclic hoist scheduling in large real-life electroplating lines

  • A. Che, C. Chu
  • OR Spectrum, vol. 29, pp. 445–470, 2007.
  • 2007
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