Optimal Process Design of Super Junction MOSFET

  title={Optimal Process Design of Super Junction MOSFET},
  author={Ey Goo Kang},
Department of Photovolatic Engineering, Far East University, Eumseong 369-851, Korea(Received July 17, 2014; Accepted July 24, 2014)Abstract: This paper was developed and described core-process to implement low on resistance which was the most important characteristics of SJ (super junction) MOSFET. Firstly, using process-simulation, SJ MOSFET optimal structure was set and developed its process flow chart by repeated simulation. Following process flow, gate level process was performed. And… CONTINUE READING