Optimal Design, Fabrication, and Control of an $XY$ Micropositioning Stage Driven by Electromagnetic Actuators

@article{Xiao2013OptimalDF,
  title={Optimal Design, Fabrication, and Control of an \$XY\$  Micropositioning Stage Driven by Electromagnetic Actuators},
  author={Shunli Xiao and Yangmin Li},
  journal={IEEE Transactions on Industrial Electronics},
  year={2013},
  volume={60},
  pages={4613-4626}
}
  • Shunli Xiao, Yangmin Li
  • Published 1 October 2013
  • Engineering, Computer Science
  • IEEE Transactions on Industrial Electronics
This paper presents the optimal design, fabrication, and control of a novel compliant flexure-based totally decoupled XY micropositioning stage driven by electromagnetic actuators. The stage is constructed with a simple structure by employing double four-bar parallelogram flexures and four noncontact types of electromagnetic actuators to realize the kinematic decoupling and force decoupling, respectively. The kinematics and dynamics modeling of the stage are conducted by resorting to compliance… Expand
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TLDR
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