Optical reflectivity and hardness improvement of hafnium nitride films via tantalum alloying

@inproceedings{Gu2016OpticalRA,
  title={Optical reflectivity and hardness improvement of hafnium nitride films via tantalum alloying},
  author={Zhiqing Gu and Haihua Huang and Sam Zhang and Xiaoyi Wang and Jing Gao and Lei Zhao and Wenjun Zheng and Chaoquan Hu},
  year={2016}
}
It is found that incorporation of tantalum in a hafnium nitride film induces a tunable optical reflectivity and improves the hardness. The underlying mechanism can be illustrated by a combination of experiments and first-principles calculations. It is shown that the evolution of optical reflectivity and the increase in hardness arise from the formation of Hf1−xTaxN solid solutions and the resulting changes in the electronic structure. The increase in infrared reflectance originates from the… CONTINUE READING

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