Optical micro-scanner fabricated on stainless steel by aerosol deposition method

An optical micro scanner, having a high speed performance at high resonance frequency of 15.8 kHz and scan angle (peak to peak value) of 18 degree in atmospheric ambient, was successfully fabricated by depositing via the aerosol deposition method of the piezoelectric materials at a high deposition rate onto the metal scanner structure, which was fabricated… CONTINUE READING