Optical characterization of thin films by guided waves.

Abstract

The study of guided waves in a thin layer allows a precise characterization of refractive index and thickness. Optical anisotropy can also be measured. We show how this technique can be applied to the characterization of a multilayer structure.

DOI: 10.1364/AO.28.002918

Cite this paper

@article{Pelletier1989OpticalCO, title={Optical characterization of thin films by guided waves.}, author={Etienne Pelletier and F I Flory and Yaowei Hu}, journal={Applied optics}, year={1989}, volume={28 14}, pages={2918-24} }