Optical characterization of hybrid antireflective coatings using spectrophotometric and ellipsometric measurements.

Abstract

A hybrid antireflective coating combining homogeneous layers and linear gradient refractive index layers has been deposited using different techniques. The samples were analyzed optically based on spectrophotometric and spectroscopic ellipsometry measurements under different angles of incidence in order to precisely characterize the coatings. The Lorentz… (More)

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