Optical characterization of aluminum-doped zinc oxide films by advanced dispersion theories

@inproceedings{Pflug2004OpticalCO,
  title={Optical characterization of aluminum-doped zinc oxide films by advanced dispersion theories},
  author={Andreas Pflug and Volker Dr. Sittinger and Florian Ruske and Bernd Szyszka and Georg Dittmar},
  year={2004}
}
ZnO:Al films were fabricated by transition mode sputtering at various working points, and their optical properties for the visible, near-infrared and far-infrared wavelength regime was modeled. Especially, the behavior of free carriers was investigated by various models and the resulting sheet resistance was compared with measurements obtained by four probe method. For optical characterization in visible and near-infrared range we used a combination of reflectance and transmittance spectra… CONTINUE READING

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